Reactively sputtered InxVyOz films for detection of NOx, D2, and O2

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2007-05, Vol.123 (2), p.779-783
Main Authors: Ali, M., Cimalla, V., Lebedev, V., Stauden, Th, Wang, Ch, Ecke, G., Tilak, V., Sandvik, P., Ambacher, O.
Format: Article
Language:English
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ISSN:0925-4005
DOI:10.1016/j.snb.2006.10.018