Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors

The contactless measurement of the sole modulus of the reflection coefficient of a grating-coupled slab waveguide sensor at three definite points of the reflection spectrum gives all necessary information for the determination of the complete set of phenomenological parameters of a waveguide grating...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2011-11, Vol.159 (1), p.27-32
Main Authors: Pietroy, David, Parriaux, Olivier, Epalle, Thibaut, Tonchev, Svetlen
Format: Article
Language:English
Subjects:
biochemistry
Biosensors
Evanescent wave sensors
methodology
Resonant reflection
sensors (equipment)
Wafer-level testing
Waveguide gratings
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Summary:The contactless measurement of the sole modulus of the reflection coefficient of a grating-coupled slab waveguide sensor at three definite points of the reflection spectrum gives all necessary information for the determination of the complete set of phenomenological parameters of a waveguide grating (bio)chemical sensor thanks to a physically meaningful representation of the resonant reflection of a free space wave in the form of a circle in the complex plane. This property leads to a simple, non-destructive, wafer-scale functional testing methodology for grating-coupled (bio)chemical sensor chips.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2011.06.008