Effect of stiffness modulation on mechanical stability of stretchable a-IGZO TFTs

In this study, we fabricate the amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) on a stretchable substrate with a buffer stage and investigate the mechanical stability and electrical characteristics when the length of the substrate is stretched by 1.7 times. The buffer stag...

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Bibliographic Details
Published in:Superlattices and microstructures 2018-05, Vol.117, p.169-172
Main Authors: Park, Hyungjin, Cho, Kyoungah, Oh, Hyungon, Kim, Sangsig
Format: Article
Language:English
Subjects:
a-IGZO TFT
Buffer stage
Stiffness modulation
Stretchable substrate
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Summary:In this study, we fabricate the amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) on a stretchable substrate with a buffer stage and investigate the mechanical stability and electrical characteristics when the length of the substrate is stretched by 1.7 times. The buffer stage is responsible for the stiffness modulation of the stretchable substrate. The mobility, the threshold voltage and the on/off ratio of the stretchable a-IGZO TFT are measured to be 18.1 cm2/V·s, 1 V, and 3 × 107, respectively. Our simulation conducted by a three dimensional finite elements method reveals that the stiffness modulation reduces the stress experienced by the substrate in the stretched state by about one-tenth. In addition, the mechanical stability and electrical characteristics of the a-IGZO TFT are maintained even when the substrate is stretched by 1.7 times. •We fabricate an a-IGZO TFT on a stretchable substrate with a buffer stage.•The buffer stage results in the stiffness modulation of the stretchable substrate.•The distribution of stress and strain about the substrate is analyzed by simulator.
ISSN:0749-6036
1096-3677
DOI:10.1016/j.spmi.2018.03.026