The growth of CoSi2 thin film in Co/W/Si(100) multilayer structures

Saved in:
Bibliographic Details
Published in:Solid state communications 2003-11, Vol.128 (6-7), p.239-244
Main Authors: MOSHFEGH, A. Z, HASHEMIFAR, S. J, AKHAVAN, O
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physical properties of thin films, nonelectronic
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thermal stability
thermal effects
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0038-1098
1879-2766
DOI:10.1016/j.ssc.2003.08.013