Time-resolved probe diagnostics of pulsed DC magnetron discharge during deposition of TiO layers

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Bibliographic Details
Published in:Surface & coatings technology 2006-12, Vol.201 (6), p.2512-2519
Main Authors: Straňák, V., Hubička, Z., Adámek, P., Blažek, J., Tichý, M., Špatenka, P., Hippler, R., Wrehde, S.
Format: Article
Language:English
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ISSN:0257-8972
DOI:10.1016/j.surfcoat.2006.04.013