Study of polycrystalline diamond deposition by continuous and pulsed discharges

The effects of pulsed microwave discharges on the deposition and properties of a set of polycrystalline diamond films are investigated by varying the duty cycle at a fixed pulse frequency and keeping constant the peak microwave power at 1250 W, the substrate temperature and the final film thickness....

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Bibliographic Details
Published in:Surface & coatings technology 2010-03, Vol.204 (12), p.1884-1888
Main Authors: Cicala, G., Brescia, R., Nitti, M.A., Romeo, A., Altamura, D., Giannini, C., Capitelli, M., Spinelli, P., Schutzmann, S.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
MWPECVD
Physics
Polycrystalline diamond film
Pulsed mode
Surface treatments
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Summary:The effects of pulsed microwave discharges on the deposition and properties of a set of polycrystalline diamond films are investigated by varying the duty cycle at a fixed pulse frequency and keeping constant the peak microwave power at 1250 W, the substrate temperature and the final film thickness. The deposition of polycrystalline diamond films obtained from highly diluted CH 4 (1% CH 4 in H 2) gas mixtures was monitored by pyrometric interferometry technique. This analysis evidences that, in order to obtain the same thickness, the nucleation/deposition times and the process rates increase and decrease, respectively, by decreasing the pulse duration. Moreover, the influence of the variations of duty cycle on the deposition rates, the surface morphology, the optical properties (refractive index and extinction coefficient) and the crystallite orientations of the polycrystalline diamond films is investigated.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2009.09.001