Surface scaling evolution and dielectric properties of sputter-deposited low loss Mg 2 SiO 4 thin films

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Bibliographic Details
Published in:Surface & coatings technology 2013-09, Vol.231, p.229-233
Main Authors: Han, Chan Su, Mohanty, Bhaskar Chandra, Choi, Hong Rak, Cho, Yong Soo
Format: Article
Language:eng ; jpn
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ISSN:0257-8972
DOI:10.1016/j.surfcoat.2012.07.071