Effects of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlCrN coatings prepared using high power impulse magnetron sputtering

• Published in: Surface & coatings technology 2020-03, Vol.386, p.125484, Article 125484
• Main Authors: Tang, Jian-Fu, Lin, Ching-Yen, Yang, Fu-Chi, Tsai, Yi-Jing, Chang, Chi-Lung
• Format: Article
• Language: English
• Subjects: AlCrN; High-power impulse magnetron sputtering; Mechanical properties; Microstructure; Nitrogen-argon flow ratio
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2020.125484

In this study, AlCrN films were deposited from Al70Cr30 alloy targets by high-power impulse magnetron sputtering (HiPIMS). The structural characteristics of the AlCrN films were modulated by performing deposition under various N2/Ar flow ratios. The results indicated that increasing the nitrogen content during deposition leads to corresponding decreases in deposition rate and film thickness, as well as a structural transformation from amorphous to crystalline. A mixture of cubic and hexagonal AlCrN phases was found in the films. Three regions of hardness were observed, and hardness increased with increasing N2/Ar ratio and peaked at 33.6GPa. Good adhesion and wear resistance were observed in all samples. •Increase in the nitrogen content, the formation of more Me–N bonds than Me–Me bonds•According to AlCrN films properties, the N2/Ar ratio was separated to three region•SAED indicated the mixed (B4 − AlN phase + B1 − CrN phase) structure was formed•The various of hardness value depend on preferred orientation