Oxidation behaviour of thin silver films deposited on plastic web characterized by spectroscopic ellipsometry (SE)

Silver layers were deposited on plastic web by DC magnetron sputtering using different additional oxygen inlet. Single Ag layers sputtered at an oxygen inlet below 14 sccm, which amounts to 12.3% (Ar: 100 sccm) of the whole gas flow, exhibited no noticeable change in optical properties. At 112 sccm...

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Bibliographic Details
Published in:Thin solid films 2004-05, Vol.455, p.819-823
Main Authors: Sahm, H, Charton, C, Thielsch, R
Format: Article
Language:English
Subjects:
Magnetron sputtering
Silver oxide
Solar control
Spectroscopic ellipsometry
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Summary:Silver layers were deposited on plastic web by DC magnetron sputtering using different additional oxygen inlet. Single Ag layers sputtered at an oxygen inlet below 14 sccm, which amounts to 12.3% (Ar: 100 sccm) of the whole gas flow, exhibited no noticeable change in optical properties. At 112 sccm O 2 the synthesis of Ag 2O is reached. At higher flow, a semi transparent coating was formed, which is assumed to be AgO. The dispersions for synthesized single AgO fit the resulting oxide layer, grown by a subsequent oxygen rich plasma process, very well. The modeling of plasma oxidation of silver showed, that the formation of the AgO phase is not the only reason for the degradation of silver containing layer stacks. Beside that agglomeration of silver takes place, intrinsic stresses (caused by the oxidation) resulting in partial delaminations and a dramatic increased roughness occurs.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2003.11.266