A sequential thin-film deposition equipment for in-situ fabricating all-solid-state thin film lithium batteries

To improve the interfacial quality and electrochemical performance of all-solid-state thin film lithium batteries (TFLBs), a sequential thin film deposition equipment has been developed. This equipment consists of a dry glove box for packing TFLB and four vacuum chambers, one chamber of them for dep...

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Bibliographic Details
Published in:Thin solid films 2007-02, Vol.515 (7), p.4045-4048
Main Authors: Liu, Wen-Yuan, Fu, Zheng-Wen, Qin, Qi-Zong
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Lithium battery
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Sequential deposition equipment
Thin film batteries
Vacuum deposition
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Summary:To improve the interfacial quality and electrochemical performance of all-solid-state thin film lithium batteries (TFLBs), a sequential thin film deposition equipment has been developed. This equipment consists of a dry glove box for packing TFLB and four vacuum chambers, one chamber of them for deposition lithium film anode by flash thermal evaporation, and the other three vacuum chambers for deposition of current collectors, cathode and solid electrolyte by magnetron sputtering, respectively. This equipment has been used to sequentially deposited Au current collector, TiO 2 cathode, LiPON (lithium phosphorus oxynitride) solid electrolyte and metallic Li anode thin films, and to prepare a TFLB with a structural configuration of Li/LiPON/TiO 2/Au via an in-situ process without breaking vacuum. The results showed that the TFLB exhibited lower interface resistance and better electrochemical performance than that fabricated via an ex-situ process.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2006.10.111