Extraction of the refractive index profile of thin transparent conductive oxide films from the analysis of reflectance optical spectra

In the direction of growth of fabricated films, the material near the free surface as well as the interface with the substrate exhibits properties which are different from those of the material in the bulk. The resulting spatial inhomogeneity of the refractive index influences positions and values o...

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Bibliographic Details
Published in:Thin solid films 2007-10, Vol.515 (24), p.8586-8589
Main Authors: Kondilis, A., Aperathitis, E., Modreanu, M.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Indium tin oxide
Inhomogeneity
Optical constants
Optical properties
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Optical properties of specific thin films
Physics
Refractive index profile
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Summary:In the direction of growth of fabricated films, the material near the free surface as well as the interface with the substrate exhibits properties which are different from those of the material in the bulk. The resulting spatial inhomogeneity of the refractive index influences positions and values of the extrema of optical spectra. We exploit this to derive the profile of the refractive index by developing a theoretical approach. In the calculations, taking the derived profile into account, we attain a good reproduction of the experimental Transmittance and Reflectance spectra from approximately 1 to 4 eV, the region of relatively weak refractive-index dispersion.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2007.03.112