Microstructure and mechanical properties of B4C films deposited by ion beam sputtering

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Bibliographic Details
Published in:Thin solid films 2007-12, Vol.516 (2-4), p.336-339
Main Authors: ZHOU, M. J, WONG, S. F, ONG, C. W, QUAN LI
Format: Article
Language:English
Subjects:
Composition and phase identification
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Mechanical and acoustical properties
Methods of deposition of films and coatings
film growth and epitaxy
Physical properties of thin films, nonelectronic
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2007.06.030