A practical simulation scheme for slot-excited microwave plasma reactor equipped with dual shower plate

• Published in: Thin solid films 2008-05, Vol.516 (13), p.4368-4373
• Main Authors: Tsuji, A., Yasaka, Y., Kang, S.-Y., Morimoto, T., Sawada, I.
• Format: Article
• Language: English
• Subjects: 52.35.Hr; 52.70.Ds; 52.80.Pi; Dual shower plate type gas feeder; Electric and magnetic measurements; Electric discharges; Electromagnetic waves (e.g., electron-cyclotron, whistler, bernstein, upper hybrid, lower hybrid); Exact sciences and technology; Fluid simulation; High-frequency discharges; Microwave discharge; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma applications; Plasma diagnostic techniques and instrumentation; Plasma processing; Waves, oscillations, and instabilities in plasmas and intense beams
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2007.10.025

A two-dimensional fluid simulation code has been developed for self-consistent calculations of wave propagations, plasma transports, and gas phase chemical reactions in a microwave plasma reactor equipped with a dual shower plate type gas feeder for the material gas injection. In this code, wave propagation and resonant absorption in nonuniform plasmas, plasma transport, and generation and diffusion of radicals in the reactor with complex structures are considered. According to the simulation, the gas feeder divides the plasma into two regions: a plasma source and a diffusion regions, and it is effective to the improvement of uniformities near the stage.