Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films

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Bibliographic Details
Published in:Thin solid films 2008-11, Vol.517 (2), p.691-694
Main Authors: SCHENCK, P. K, KLAMO, J. L, BASSIM, N. D, BURKE, P. G, GERBIG, Y. B, GREEN, M. L
Format: Article
Language:English
Subjects:
Composition and phase identification
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Laser deposition
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2008.08.001