Grazing incidence X-ray study of Ge-nanoparticle formation in (Ge:SiO2)/SiO2 multilayers

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Bibliographic Details
Published in:Thin solid films 2009-01, Vol.517 (6), p.1899-1903
Main Authors: Salamon, K., Milat, O., Buljan, M., Desnica, U.V., Radić, N., Dubček, P., Bernstorff, S.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/j.tsf.2008.09.098