Properties of cosputtered SiO2-Ta2O5-mixtures

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Bibliographic Details
Published in:Thin solid films 2009-03, Vol.517 (10), p.3126-3129
Main Authors: POLENZKY, Christina, RICKERS, Christoph, VERGÖHL, Michael
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical coatings
Optical elements, devices, and systems
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Optics
Physics
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Summary:
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2008.11.095