Anatase–rutile transformation through high-temperature annealing of titania films produced by ultrasonic spray pyrolysis

• Published in: Thin solid films 2010-05, Vol.518 (14), p.3735-3742
• Main Authors: Nakaruk, A., Ragazzon, D., Sorrell, C.C.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diffusion; interface formation; Exact sciences and technology; Glancing angle X-ray diffraction; Materials science; Mechanical and acoustical properties; Nanoscale materials and structures: fabrication and characterization; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of specific thin films; Other topics in nanoscale materials and structures; Physical properties of thin films, nonelectronic; Physics; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Titanium dioxide; Ultrasonic spray pyrolysis
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2009.10.109

Titanium dioxide films were prepared by ultrasonic spray pyrolysis on (0001) α-quartz substrates at 400 °C and/or annealed in air at 600°, 800°, or 1000 °C. The as-deposited films at 400 °C (50 nm grains) and annealed at 600 °C (100 nm grains) showed single-phase anatase of high transparency in the visible region. Films annealed at 800 °C and 1000 °C showed mixed-phase anatase (100 nm grains) plus rutile (700 nm agglomerates) and pure rutile, (700 nm grains), respectively. Raman and X-ray data indicate the presence of residual stress in the films, which may arise from contamination, silicon diffusion into the films, and/or oxygen deficiency.