Radio frequency-H 2 O plasma treatment on indium tin oxide films produced by electron beam and radio frequency magnetron sputtering methods

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Bibliographic Details
Published in:Thin solid films 2014-09, Vol.567, p.32-37
Main Authors: Kiristi, Melek, Gulec, Ali, Bozduman, Ferhat, Oksuz, Lutfi, Oksuz, Aysegul Uygun, Hala, Ahmed
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/j.tsf.2014.07.035