Synthesis and mechanical properties of Mo–Al–Si–N films deposited by direct current magnetron sputtering

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Bibliographic Details
Published in:Thin solid films 2016-03, Vol.603, p.75-79
Main Authors: Yuan, Z.G., Sun, L., Gong, W.B., Xu, Z.L., Wu, X.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/j.tsf.2016.01.053