Inductively coupled plasma surface modification of polyethylene terephthalate and application in a triboelectric generator

We herein report our investigation into the effect of plasma-induced surface modification of a polyethylene terephthalate (PET) surface on the output performance of a triboelectric generator (TEG). The PET surface was subjected to plasma treatment using a CF4/CH4/Ar gas mixture (25–75% CF4) to incre...

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Bibliographic Details
Published in:Thin solid films 2017-09, Vol.637, p.27-31
Main Authors: Lim, Nomin, Hong, Daewoong, Kim, Changmok, Jeong, Jaehwa, Lee, Hyun Woo, Kwon, Kwang-Ho
Format: Article
Language:English
Subjects:
Energy harvesting
Plasma treatment
Polyethylene terephthalate
Triboelectric generator
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Summary:We herein report our investigation into the effect of plasma-induced surface modification of a polyethylene terephthalate (PET) surface on the output performance of a triboelectric generator (TEG). The PET surface was subjected to plasma treatment using a CF4/CH4/Ar gas mixture (25–75% CF4) to increase the surface roughness and triboelectric charge density. Plasma diagnostics were then performed using optical emission spectroscopy and a double Langmuir probe, while analysis of the surface roughness and surface characteristics was performed using atomic force microscopy and X-ray photoelectron spectroscopy, respectively. Following plasma treatment, we prepared a triboelectric energy harvester device, and demonstrated an outstanding improvement in TEG short-circuit current measurements. •The performance of the triboelectric generator was improved through the plasma treatment.•We attempted an analysis of the surface treatment mechanisms.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2017.03.034