Optical characterization of low temperature amorphous MoOx, WOX, and VOx prepared by pulsed laser deposition

•Amorphous MoOx, WOx, and VOx were prepared by pulsed laser deposition.•Films demonstrate high transparency and high work function.•Oxygen pressure is a key optimization parameter for pulsed laser deposition.•Photothermal deflection spectroscopy decouples absorptance and reflectance effects.•Absorpt...

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Bibliographic Details
Published in:Thin solid films 2020-01, Vol.693, p.137690, Article 137690
Main Authors: Horynová, Eva, Romanyuk, Oleksandr, Horák, Lukáš, Remeš, Zdeněk, Conrad, Brianna, Peter Amalathas, Amalraj, Landová, Lucie, Houdková, Jana, Jiříček, Petr, Finsterle, Tomáš, Holovský, Jakub
Format: Article
Language:English
Subjects:
Optical spectroscopy
Photothermal deflection spectroscopy
Transparent metal oxide
Urbach energy
Work function
Work function, Pulsed laser deposition
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Summary:•Amorphous MoOx, WOx, and VOx were prepared by pulsed laser deposition.•Films demonstrate high transparency and high work function.•Oxygen pressure is a key optimization parameter for pulsed laser deposition.•Photothermal deflection spectroscopy decouples absorptance and reflectance effects.•Absorption coefficient and refractive index for a range of materials are given.
ISSN:0040-6090
DOI:10.1016/j.tsf.2019.137690