Sp-based thin films synthesized by magnetron sputtering of dehydrohalogenated Polyvinylidenchloride

• Published in: Thin solid films 2021-12, Vol.739, p.138993, Article 138993
• Main Authors: Streletskiy, O.A., Nishchak, O. Yu, Zavidovskiy, I.A., Maslakov, K.I., Pavlikov, A.V.
• Format: Article
• Language: English
• Subjects: Raman spectroscopy, Fourier-transform infrared spectroscopy, X-ray photoelectron spectroscopy; Sp-based carbon, Thin films, Magnetron sputtering
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2021.138993

•Modified approach to the synthesis of sp-based films suggested.•Films by polyvinylidenchloride dehydrohalogenation followed by magnetron sputtering.•Analysis showed that films consist of sp-carbon chains and nanocrystalline graphite.•Evaporation and clusters sputtering mechanisms of sp-chains transfer suggested. We present a modified approach to the synthesis of sp-based films. This technique includes two stages: the dehydrohalogenation of polyvinylidene chloride powder and its subsequent sputtering. The synthesized films were characterized by Raman spectroscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and X-ray excited Auger electron spectroscopy. The films were shown to consist of sp-hybridized carbon chains and nanocrystalline graphite. Sp-carbon evaporation and sp-hybridized clusters sputtering mechanisms leading to sp-clusters transfer from an sp-rich target to the growing film surface were discussed.