Ion-beam formation of nanopores and nanoclusters in SiO2

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Bibliographic Details
Published in:Vacuum 2005-05, Vol.78 (2-4), p.361-366
Main Authors: Komarov, F.F., Vlasukova, L.A., Milchanin, O.M., Gaiduk, P.I., Yuvchenko, V.N., Grechnyi, S.S.
Format: Article
Language:English
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2005.01.050