Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma

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Bibliographic Details
Published in:Vacuum 2007-01, Vol.81 (5), p.669-675
Main Authors: Efremov, A.M., Kim, Gwan-Ha, Kim, Jong-Gyu, Bogomolov, A.V., Kim, Chang-Il
Format: Article
Language:English
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2006.09.017