WITHDRAWN: Ellipsometric and XPS study on SiCN films deposited by hot-wire chemical vapor deposition method

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Bibliographic Details
Published in:Vacuum 2009-02
Main Authors: Kamrul Hasan, Syed, Matsuo, Kousuke, Izumi, Akira
Format: Article
Language:English
Online Access:Get full text
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2009.02.008