Study of initial stages of thin film growth by means of computer simulation and image analysis: Advanced atomistic modelling

A method of computer experiment was used for a study of nucleation and initial stages of three-dimensional film growth. In the first part of the experiment, the simulated structures with given parameters were generated by a model combining the molecular dynamics and Monte Carlo approaches. In the se...

Full description

Saved in:
Bibliographic Details
Published in:Vacuum 2013-04, Vol.90, p.121-128
Main Authors: Hrach, Rudolf, Novotný, Dušan, Hrubý, Vojtěch
Format: Article
Language:English
Subjects:
Atomistic modelling
Discontinuous thin films
Image analysis
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A method of computer experiment was used for a study of nucleation and initial stages of three-dimensional film growth. In the first part of the experiment, the simulated structures with given parameters were generated by a model combining the molecular dynamics and Monte Carlo approaches. In the second part, the acquired structures were analysed by means of morphological methods. The ‘Quadrat Counts’ method and Voronoi tessellation were used and compared. The influence of individual modelled parameters such as deposition rate, contact angle and condensation coefficient was studied and discussed. The used morphological methods were also applied on the TEM images of indium films in order to compare the obtained results.
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2012.07.008