Implementation of the continuous expansion method with a variable conductance in the pressure range 1 × 10−6 to 1 × 10−3 Pa

The continuous expansion method is widely used by National metrology institutes for traceability of vacuum measurements below 10−3 Pa. It is usually implemented using a fixed conductance such as a small circular orifice. This article describes how LCM-LNE has used the method with a variable conducta...

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Bibliographic Details
Published in:Vacuum 2015-12, Vol.122, p.245-249
Main Authors: Boineau, Frédéric, Guillou, Julien, Plimmer, Mark D.
Format: Article
Language:English
Subjects:
Constant pressure flowmeter
Continuous expansion method
Metrology
Pressure ratio technique
Vacuum
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Summary:The continuous expansion method is widely used by National metrology institutes for traceability of vacuum measurements below 10−3 Pa. It is usually implemented using a fixed conductance such as a small circular orifice. This article describes how LCM-LNE has used the method with a variable conductance and includes a detailed uncertainty budget. •The continuous expansion method (pressure ratio technique) has been carried out with a non calculable conductance.•The conductance has a crescent-shaped area.•Experiments show the conductance remains pressure independent up to 5E-3 Pa.•The final reference pressure depends on the pressure ratio and the conductance determined at high pressure.
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2015.05.025