Arc energy minimization in high-power impulse magnetron sputtering

• Published in: Vacuum 2022-08, Vol.202, p.111213, Article 111213
• Main Authors: Oskirko, V.O., Semenov, V.D., Solovyev, A.A., Rabotkin, S.V., Pavlov, A.P., Zakharov, A.N.
• Format: Article
• Language: English
• Subjects: Arc elimination; Arcing; High-power impulse magnetron sputtering; Power supply
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2022.111213

High-power impulse magnetron sputtering (HiPIMS) is rather a new and rapidly developing method for physical vapor deposition of thin films. Due to a high ionization degree of the sputtered material, the HiPIMS coatings have better properties than those produced by conventional DC magnetron sputtering (DCMS) and mid-frequency magnetron sputtering (MFMS). Along with its advantages, HiPIMS has some disadvantages, which make difficult its application. HiPIMS is characterized by the high pulsed discharge current, which provides higher arc frequency and energy than in MFMS and DCMS. This leads to larger defect size and quantity that appear in the coating obtained. This paper proposes the analytical simulation model to describe the discharge current and discharge voltage during arcing. This model helps to calculate the arc energy, lifetime, and maximum current. It also identifies what parameters of the power supply exert the highest effect on the arc parameters. The paper considers the types of the HiPIMS power supply and compares them with the view of arc quenching effectiveness. The model adequacy is verified by the experimental results of measurement the arc parameters in HiPIMS. It is shown the effect of arc energy on the size and number of defects in the carbon coatings obtained in HiPIMS. [Display omitted] •Studied is the arc energy minimization in high-power impulse magnetron sputtering.•Analytical simulation model is proposed to describe the arc parameters.•Model adequacy is verified by measurement of the arc parameters in HiPIMS.•The types of the power supply are compared in terms of the arc quenching effectiveness.•The arc energy effect on the defect size is described for the carbon coatings.