Study on hydrogen absorption performance of the modified Zr/ZrVFe porous getters

• Published in: Vacuum 2024-11, Vol.229, p.113556, Article 113556
• Main Authors: Song, Yi, Chen, Xiuwu, Kong, Fanting, Feng, Yan, Cheng, Yongjun
• Format: Article
• Language: English
• Subjects: H2 absorption performance; Ni overlayer; Zr content; Zr/ZrVFe getter
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2024.113556

Non-evaporable getter is used to remove active gases in sealed-off vacuum devices, especially H2 at room temperature. In this work, Zr/ZrVFe getters with different Zr content (0, 30 and 50 %) were fabricated using vacuum sintering method, then futher improvement of pumping properties had been explored with Ni overlayer as deposited on the surfaces of Zr/ZrVFe getter by magnetron sputtering technique. Subsequently, residual gas and pressure change during the activation process of Zr/ZrVFe getters were measured. It was found that when the activation temperature reached 350 °C, the desorption of impurity gases was basically completed, there was only H2 in the system. Moreover, the hydrogen absorption properties of the Zr/ZrVFe getters modified by Zr content and Ni overlayer were examined. Results indicated that the sintered ZrVFe getter with 0 % Zr content had a large number of cracks and occurred the phenomenon of falling powder, Zr30 %/ZrVFe getter had better hydrogen absorption properties in comparison with Zr50 %/ZrVFe getter owing to the larger porosity and specific surface area. Ni had the catalytic characteristics of decomposing molecular hydrogen into hydrogen atoms and Ni film was uniformly covered on the getter surface, the hydrogen absorption properties of Zr/ZrVFe getter with Ni overlayer were significantly improved. •Zr/ZrVFe getters were fabricated using vacuum sintering method.•The Ni overlayer was deposited by magnetron sputtering technique.•Reduce the Zr content in Zr50 %/ZrVFe to 30 % can improve the absorption properties.•The surface modification with Ni have a better improvement effect.