New Developments in Gemini® Fesem Technology

The Field Emission SEM was introduced to improve imaging resolution available with conventional SEMs with a tungsten source. Thermal assisted or Schottky Field Emission SEMs were introduced in s the nineties by a number of companies as a stable source to overcome the beam instability of the cold FES...

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Bibliographic Details
Published in:Microscopy today 2005-03, Vol.13 (2), p.8-11
Main Authors: Jaksch, H., Vermeulen, J-P
Format: Magazinearticle
Language:English
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Summary:The Field Emission SEM was introduced to improve imaging resolution available with conventional SEMs with a tungsten source. Thermal assisted or Schottky Field Emission SEMs were introduced in s the nineties by a number of companies as a stable source to overcome the beam instability of the cold FESEMs introduced earlier. The Gemini® based Field Emission SEM launched by Zeiss 12 years ago has been designed from the beginning as a high stability FESEM with a relatively large multi-ported chamber. The drive to develop Gemini® technology was the need for a FESEM capable of ultra-high resolution performance over the entire accelerating voltage range that also possessed the flexibility needed for a wide range of analytical applications.
ISSN:1551-9295
2150-3583
DOI:10.1017/S1551929500051397