Analysis of thin films by ion microprobe mass spectrometry

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Bibliographic Details
Published in:Analytical chemistry (Washington) 1970-08, Vol.42 (9), p.1060-1064
Main Authors: Evans, Charles Andrew, Pemsler, J. P
Format: Article
Language:English
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ISSN:0003-2700
1520-6882
DOI:10.1021/ac60291a033