Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO 2 Films Grown by the Plasma-Assisted Atomic Layer Deposition

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Bibliographic Details
Published in:Chemistry of materials 2019-06, Vol.31 (11), p.3900-3908
Main Authors: Avila, Jason R., Qadri, Syed B., Freitas, Jaime A., Nepal, Neeraj, Boris, David R., Walton, Scott G., Eddy, Charles R., Wheeler, Virginia D.
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/acs.chemmater.8b05282