Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H 2 O and O 3 as Oxygen Sources

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Bibliographic Details
Published in:Journal of physical chemistry. C 2017-08, Vol.121 (32), p.17498-17504
Main Authors: Lee, Woo Chul, Cho, Cheol Jin, Kim, Sangtae, Larsen, Eric S., Yum, Jung Hwan, Bielawski, Christopher W., Hwang, Cheol Seong, Kim, Seong Keun
Format: Article
Language:English
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ISSN:1932-7447
1932-7455
DOI:10.1021/acs.jpcc.7b05240