Improving the Properties of SrRuO 3 Electrode Films Grown by Atomic Layer-Deposited SrO and Pulsed Chemical Vapor-Deposited RuO 2 Using Al 2 O 3 Capping Layers

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Bibliographic Details
Published in:ACS applied electronic materials 2023-08, Vol.5 (8), p.4494-4503
Main Authors: Lim, Junil, Kwon, Dae Seon, Seo, Haengha, Kim, Tae Kyun, Paik, Heewon, Shin, Jonghoon, Song, Haewon, Jang, Yoon Ho, Park, Yu-kyung, Lee, Keonuk, Kim, Young Sin, Choi, Jung-Hae, Hwang, Cheol Seong
Format: Article
Language:English
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ISSN:2637-6113
2637-6113
DOI:10.1021/acsaelm.3c00680