Systematically Probing the Effect of Microscopic Features on the Sensing Performance of Piezoresistive Pressure Sensors

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Bibliographic Details
Published in:ACS applied electronic materials 2023-11, Vol.5 (11), p.5864-5871
Main Authors: Li, Xin, Gu, Mengxi, Su, Weiguo, Li, Kun, Han, Yankun, Liu, Aoxing, Li, Wenjie, Yang, Chunlei, Chen, Ming
Format: Article
Language:English
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ISSN:2637-6113
2637-6113
DOI:10.1021/acsaelm.3c00796