Airborne contamination of a chemically amplified resist. 1. Identification of problem

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Bibliographic Details
Published in:Chemistry of materials 1993-03, Vol.5 (3), p.348-356
Main Authors: MacDonald, Scott A, Hinsberg, William D, Wendt, H. Russell, Clecak, Nicholas J, Willson, C. Grant, Snyder, Clinton D
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm00027a018