Low-temperature chemical vapor deposition of antimony films using diisopropylantimony hydride ((i-Pr)2SbH)

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Bibliographic Details
Published in:Chemistry of materials 1993-07, Vol.5 (7), p.979-982
Main Authors: Gedridge, Robert W, Lee, Kenneth E, Lowe-Ma, Charlotte
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm00031a017