Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers

Saved in:
Bibliographic Details
Published in:Chemistry of materials 1994-07, Vol.6 (7), p.977-982
Main Authors: Scarlete, Mihai, Brienne, Stephane, Butler, Ian S, Harrod, John F
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Inorganic and organomineral polymers
Physicochemistry of polymers
Properties and characterization
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0897-4756
1520-5002
DOI:10.1021/cm00043a020