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Poly(1,4-phenyleneazine N,N-dioxide): A Recyclable Material for a Solventless Laser-Imageable Resist Process

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Bibliographic Details
Published in:Chemistry of materials 1994-11, Vol.6 (11), p.1978-1981
Main Authors: Baum, Thomas H, Larson, Carl E, Hacker, Nigel P
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm00047a015