GaN Film Growth Using Single-Source Precursors

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Bibliographic Details
Published in:Chemistry of materials 1995-03, Vol.7 (3), p.546-552
Main Authors: Lakhotia, Vikas, Neumayer, Deborah A, Cowley, A. H, Jones, R. A, Ekerdt, J. G
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm00051a016