Gas-Phase Pyrolysis of tert-Butyl(allyl)selenium, a New Precursor for Organometallic Chemical Vapor Deposition of ZnSe

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Bibliographic Details
Published in:Chemistry of materials 1995-04, Vol.7 (4), p.731-737
Main Authors: Danek, Michal, Huh, Jeung-Soo, Jensen, Klavs F, Gordon, Douglas C, Kosar, Walter P
Format: Article
Language:English
Subjects:
Chemistry
Exact sciences and technology
General and physical chemistry
Solid-gas interface
Surface physical chemistry
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm00052a019