Low-Temperature Al 2 O 3 Atomic Layer Deposition

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Bibliographic Details
Published in:Chemistry of materials 2004-02, Vol.16 (4), p.639-645
Main Authors: Groner, M. D., Fabreguette, F. H., Elam, J. W., George, S. M.
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm0304546