Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays

A simple process for the fabrication of large-area well-ordered periodic nanopillar arrays have been developed based on a combination of colloidal lithography and etching techniques. Large-area nanopillar arrays have been successfully fabricated by this approach. The lateral dimensions of nanopillar...

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Bibliographic Details
Published in:Chemistry of materials 2003-07, Vol.15 (15), p.2917-2920
Main Authors: Kuo, Chun-Wen, Shiu, Jau-Ye, Chen, Peilin
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Nanoscale materials and structures: fabrication and characterization
Physics
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Summary:A simple process for the fabrication of large-area well-ordered periodic nanopillar arrays have been developed based on a combination of colloidal lithography and etching techniques. Large-area nanopillar arrays have been successfully fabricated by this approach. The lateral dimensions of nanopillars as small as 40 nm and the aspect ratio as high as 7:1 have been achieved. Our results indicate that it is possible to control the size, shape, and height of nanopillar arrays by fine-tuning the etching recipes. These periodic nanopillar arrays can be used as stamps for nanoimprinting lithography and contact printing lithography to produce more complex periodic nanostructures.
ISSN:0897-4756
1520-5002
DOI:10.1021/cm0343249