Atomic Layer Deposition of Y 2 O 3 Thin Films from Yttrium Tris( N , N ‘-diisopropylacetamidinate) and Water

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Bibliographic Details
Published in:Chemistry of materials 2005-09, Vol.17 (19), p.4808-4814
Main Authors: de Rouffignac, Philippe, Park, Jin-Seong, Gordon, Roy G.
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm050624+