Low-Temperature OMCVD of InN Thin Films from the Novel Air-Stable Single-Molecule Precursor Azido{bis[(3-dimethylamino)propyl]}indium, (N3)In[(CH2)3NMe2]2

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Bibliographic Details
Published in:Chemistry of materials 1996-07, Vol.8 (7), p.1356-1359
Main Authors: Fischer, Roland A, Miehr, Alexander, Metzger, Thomas, Born, Eberhard, Ambacher, Oliver, Angerer, Helmut, Dimitrov, Roman
Format: Article
Language:English
Subjects:
Chemistry
Exact sciences and technology
General and physical chemistry
Solid-gas interface
Surface physical chemistry
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm9600642