Reactivity of Fluorinated Si(100) with F 2

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Bibliographic Details
Published in:The journal of physical chemistry. B 2001-01, Vol.105 (2), p.486-496
Main Authors: Pullman, D. P., Tsekouras, A. A., Li, Y. L., Yang, J. J., Tate, M. R., Gosalvez, D. B., Laughlin, K. B., Schulberg, M. T., Ceyer, S. T.
Format: Article
Language:English
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ISSN:1520-6106
1520-5207
DOI:10.1021/jp002443v