Bidimensional X-ray Diffraction Analysis for Structural and Microstructural Characterization of Lanthanum Manganite Thin Films

Sodium-doped lanthanum manganite thin films were deposited by Rf-magnetron sputtering onto Si(100) single-crystal substrates. Structural and microstructural properties of both as-deposited and annealed samples were investigated by means of X-ray bidimensional microdiffraction. Two distinct preferred...

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Bibliographic Details
Published in:The journal of physical chemistry. B 2004-04, Vol.108 (17), p.5189-5191
Main Authors: Alessandri, Ivano, Gelfi, Marcello, Bontempi, Elza, Roberti, Roberto, Depero, Laura E
Format: Article
Language:English
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Summary:Sodium-doped lanthanum manganite thin films were deposited by Rf-magnetron sputtering onto Si(100) single-crystal substrates. Structural and microstructural properties of both as-deposited and annealed samples were investigated by means of X-ray bidimensional microdiffraction. Two distinct preferred orientations have been detected as a result of the formation of two layers during the growth process. A new method (Debye ring analysis for stress measurement, DRAST), based on the analysis of Debye ring distortion, allowed the strain associated with the preferentially oriented domains to be evaluated.
ISSN:1520-6106
1520-5207
DOI:10.1021/jp0489673