Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H 2 O Reactions

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Bibliographic Details
Published in:Journal of physical chemistry. C 2014-06, Vol.118 (25), p.14009-14016
Main Authors: Geier, Barbara, Gspan, Christian, Winkler, Robert, Schmied, Roland, Fowlkes, Jason D., Fitzek, Harald, Rauch, Sebastian, Rattenberger, Johannes, Rack, Philip D., Plank, Harald
Format: Article
Language:English
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ISSN:1932-7447
1932-7455
DOI:10.1021/jp503442b