Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H 2 O Reactions

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Published in:Journal of physical chemistry. C 2014-06, Vol.118 (25), p.14009-14016
Main Authors: Geier, Barbara, Gspan, Christian, Winkler, Robert, Schmied, Roland, Fowlkes, Jason D., Fitzek, Harald, Rauch, Sebastian, Rattenberger, Johannes, Rack, Philip D., Plank, Harald
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Language:English
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cited_by cdi_FETCH-LOGICAL-c74b-23b0f6824dd46d408259a0e594be449c8d74608634d3b9d980a58c2de95e49043
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container_end_page 14016
container_issue 25
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container_title Journal of physical chemistry. C
container_volume 118
creator Geier, Barbara
Gspan, Christian
Winkler, Robert
Schmied, Roland
Fowlkes, Jason D.
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Rauch, Sebastian
Rattenberger, Johannes
Rack, Philip D.
Plank, Harald
description
doi_str_mv 10.1021/jp503442b
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source American Chemical Society:Jisc Collections:American Chemical Society Read & Publish Agreement 2022-2024 (Reading list)
title Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H 2 O Reactions
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