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Degradable Cross-Linkers and Strippable Imaging Materials for Step-and-Flash Imprint Lithography
The ability to produce tough, cross-linked networks that can, if necessary, be rendered soluble by an external stimulus such as acid or heat is highly desirable for a number of applications. An acetal containing diacrylate, 2,2-di(acryloyloxy-1-ethoxy)propane (ADA) (1), was synthesized by transketal...
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Published in: | Macromolecules 2008-02, Vol.41 (3), p.719-726 |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The ability to produce tough, cross-linked networks that can, if necessary, be rendered soluble by an external stimulus such as acid or heat is highly desirable for a number of applications. An acetal containing diacrylate, 2,2-di(acryloyloxy-1-ethoxy)propane (ADA) (1), was synthesized by transketalization with 2-hydroxyethyl acrylate. Its photopolymerization kinetics were measured by real-time FT-IR and its degradation in acidic organic solvents was evaluated. Additionally, a diacrylate cross-linker containing a thermally labile Diels−Alder (DA) linkage (2) was synthesized and its reversibility was evaluated using solid-state NMR spectroscopy. The DA cross-linker (2) and ADA (1) were evaluated for use in Step-and-Flash Imprint Lithography (S-FIL). Finally, a dimethacrylate cross-linker containing a thermally labile urethane-oxime linkage (10) was synthesized. Its copolymerization with methyl methacrylate and reversibility were evaluated by size exclusion chromatography (SEC) and 1H NMR spectroscopy. |
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ISSN: | 0024-9297 1520-5835 |
DOI: | 10.1021/ma702291k |